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Microlithography : process technology for IC fabrication /

Elliott, David J.

Microlithography : process technology for IC fabrication / David J. Elliott - New York : McGraw - Hill Book, c1986 - 378 p. : illus, charts.

ISBN: 0070193045

Subjects--Topical Terms:
Integrated circuits--Very large scale integration--Design and construction.
Microlithography.
Photoresists.

Dewey Class. No.: 621.381 / E46M

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