Entry Topical Term

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 46562

003 - CONTROL NUMBER IDENTIFIER

• control field: MTX

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20190306111010.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 190306|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: MTX
• Transcribing agency: MTX

150 ## - HEADING--TOPICAL TERM

• Topical term or geographic name entry element: Integrated circuits
• General subdivision: Very large scale integration
• General subdivision: Design and construction.

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (MTX)20581: Elliott, David J. 46561, Microlithography : process technology for IC fabrication /, c1986