Elliott, David J. <br/><br/>
Microlithography : process technology for IC fabrication / 
David J. Elliott 
 - New York :  McGraw - Hill Book,  c1986 
 - 378 p. :  illus, charts. 
<br/><br/><label>ISBN: </label>0070193045 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Very large scale integration--Design and construction.<br/>Microlithography.<br/>Photoresists.
<br/><br/><label>Dewey Class. No.: </label>621.381  / E46M