TY  - BOOK
AU  - Elliott,David J.
TI  - Microlithography : process technology for IC fabrication
SN  - 0070193045
U1  - 621.381 
PY  - 1986///
CY  - New York
PB  - McGraw - Hill Book
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Design and construction
KW  - Microlithography
KW  - Photoresists
ER  -