| 000 | 00800 am a2200229 4500 | ||
|---|---|---|---|
| 001 | vtls000022561 | ||
| 003 | MTX | ||
| 008 | 990203s1986 nyuad 001 0 eng d | ||
| 020 | _a0070193045 | ||
| 035 | _a0022-99160 | ||
| 039 | 9 |
_a201607251221 _bVLOAD _c1 _dSTAFF MATRIX _c201507201729 _dVLOAD _c201310171729 _dVLOAD _y200405061234 _zVLOAD |
|
| 040 | _aPBRU | ||
| 082 | 0 | 4 |
_a621.381 _bE46M |
| 100 | 1 |
_aElliott, David J. _946561 |
|
| 245 | 1 | 0 |
_aMicrolithography : process technology for IC fabrication / _cDavid J. Elliott |
| 260 |
_aNew York : _bMcGraw - Hill Book, _cc1986 |
||
| 300 |
_a378 p. : _billus, charts. |
||
| 650 | 4 |
_aIntegrated circuits _xVery large scale integration _xDesign and construction. _946562 |
|
| 650 | 4 |
_aMicrolithography. _946563 |
|
| 650 | 4 |
_aPhotoresists. _946564 |
|
| 942 | _c1 | ||
| 999 |
_c20581 _d20581 |
||